Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048515 | Graphite material and a method of producing graphite material | Toshiyuki Nishiwaki, Masahiro Yasuda | 2011-11-01 |
| 7968256 | Near field exposure mask, method of forming resist pattern using the mask, and method of producing device | Natsuhiko Mizutani, Akira Terao | 2011-06-28 |
| 7932014 | Photosensitive compound, photosensitive composition, resist pattern forming method, and device production process | — | 2011-04-26 |
| 7923201 | Near-field exposure method | Akira Terao | 2011-04-12 |
| 7906367 | Method of forming fine particle pattern, and method of producing a device | — | 2011-03-15 |
| 7901866 | Pattern forming method | — | 2011-03-08 |
| 7871744 | Near-field exposure apparatus and near-field exposure method | Yasuhisa Inao, Natsuhiko Mizutani | 2011-01-18 |