Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079375 | Processing apparatus and atmosphere exchange method | Shinya Mochizuki | 2011-12-20 |
| 8059257 | Exposure apparatus and device manufacturing method | — | 2011-11-15 |
TK
Takashi Kamono
Overall (2011): #64,193 of 364,097Top 20%
2
Patents 2011