Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084365 | Method of manufacturing a nano structure by etching, using a substrate containing silicon | Kenji Tamamori, Shinan Wang, Masahiko Okunuki, Haruhito Ono, Toshiaki Aiba +1 more | 2011-12-27 |
| 7902637 | Nano structure and method of manufacturing nano structure | Kenji Tamamori, Shinan Wang, Masahiko Okunuki, Haruhito Ono, Toshiaki Aiba +1 more | 2011-03-08 |