Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864337 | Positioning apparatus, exposure apparatus, and device manufacturing method | — | 2011-01-04 |
TN
Tadayasu Nishikawa
Overall (2011): #152,372 of 364,097Top 45%
1
Patents 2011