Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960703 | Charged-particle beam lithography apparatus and device manufacturing method | — | 2011-06-14 |
SG
Susumu Goto
Overall (2011): #157,090 of 364,097Top 45%
1
Patents 2011