Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927473 | Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program | Hiroshi Torii | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927473 | Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program | Hiroshi Torii | 2011-04-19 |