Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035668 | Exposure apparatus and device manufacturing method | Mitsuro Sugita, Kazuaki Ohmi, Takao Yonehara, Toshihiko Tsuji, Takaaki Terashi +1 more | 2011-10-11 |
ST
Shinji Tsutsui
Overall (2011): #165,189 of 364,097Top 50%
1
Patents 2011