Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961295 | Exposure apparatus, measurement method, stabilization method, and device fabrication method | — | 2011-06-14 |
NY
Nobuhiko Yabu
Overall (2011): #202,248 of 364,097Top 60%
1
Patents 2011