Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045138 | Support plate, exposure apparatus having the support plate, and a device manufacturing method using the exposure apparatus | — | 2011-10-25 |
MO
Makoto Ogusu
Overall (2011): #223,309 of 364,097Top 65%
1
Patents 2011