Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955765 | Adjustment method, exposure method, device manufacturing method, and exposure apparatus | — | 2011-06-07 |
KS
Ken-ichiro Shinoda
Overall (2011): #244,498 of 364,097Top 70%
1
Patents 2011