Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058072 | Microanalysis measuring apparatus and microanalysis measuring method using the same | Minoru Seki, Junya Takagi, Yoshinori Akagi | 2011-11-15 |
| 7924437 | Measurement method and apparatus, exposure apparatus | — | 2011-04-12 |