Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990518 | Immersion exposure apparatus and device manufacturing method | — | 2011-08-02 |
KO
Kaoru Ogino
Overall (2011): #249,870 of 364,097Top 70%
1
Patents 2011