Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919397 | Method for reducing agglomeration of Si layer, method for manufacturing semiconductor device and vacuum treatment apparatus | Hiroki Date | 2011-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919397 | Method for reducing agglomeration of Si layer, method for manufacturing semiconductor device and vacuum treatment apparatus | Hiroki Date | 2011-04-05 |