Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049891 | Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method | — | 2011-11-01 |
| 7888513 | Condensation reaction by metal catalyst | Kazushi Mashima, Takashi Ohshima, Takanori Iwasaki, Kenya Ishida | 2011-02-15 |