Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085384 | Exposure apparatus | Akiyoshi Suzuki | 2011-12-27 |
| 8009272 | Method and device for image measurement, exposure apparatus, substrate for image measurement, and device manufacturing method | — | 2011-08-30 |
| 7929113 | Measurement apparatus, measurement method, exposure apparatus, and device manufacturing method | — | 2011-04-19 |
| 7911585 | Measurement apparatus, exposure apparatus, and device manufacturing method | — | 2011-03-22 |