Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990543 | Surface characterization based on optical phase shifting interferometry | Michael Mello | 2011-08-02 |
| 7966135 | Characterizing curvatures and stresses in thin-film structures on substrates having spatially non-uniform variations | Yonggang Huang | 2011-06-21 |
| 7930113 | Measuring stresses in multi-layer thin film systems with variable film thickness | Yonggang Huang | 2011-04-19 |