Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7953582 | Method and system for lithography simulation and measurement of critical dimensions | Daisuke Hara, Takashi Mitsuhashi | 2011-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7953582 | Method and system for lithography simulation and measurement of critical dimensions | Daisuke Hara, Takashi Mitsuhashi | 2011-05-31 |