Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029226 | Semiconductor manufacturing systems | — | 2011-10-04 |
| 8029225 | Stacked process modules for a semiconductor handling system | — | 2011-10-04 |
| 7988399 | Mid-entry load lock for semiconductor handling system | — | 2011-08-02 |
| 7959403 | Linear semiconductor processing facilities | — | 2011-06-14 |
| 7945348 | Methods and systems for controlling a semiconductor fabrication process | Patrick D. Pannese, Vinaya Kavathekar | 2011-05-17 |
| 7899562 | Methods and systems for controlling a semiconductor fabrication process | Patrick D. Pannese, Vinaya Kavathekar | 2011-03-01 |
| 7894657 | Wafer center finding | Forrest Buzan | 2011-02-22 |