Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7939244 | Photosensitive hardmask for microlithography | Hao Xu, Douglas J. Guerrero | 2011-05-10 |
| 7914974 | Anti-reflective imaging layer for multiple patterning process | Douglas J. Guerrero | 2011-03-29 |