Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994488 | Low contamination, low energy beamline architecture for high current ion implantation | — | 2011-08-09 |
| 7915597 | Extraction electrode system for high current ion implanter | Ilya Pokidov | 2011-03-29 |