Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080814 | Method for improving implant uniformity during photoresist outgassing | — | 2011-12-20 |
| 8071964 | System and method of performing uniform dose implantation under adverse conditions | — | 2011-12-06 |
| 8035080 | Method and system for increasing beam current above a maximum energy for a charge state | — | 2011-10-11 |
| 7973290 | System and method of beam energy identification for single wafer ion implantation | — | 2011-07-05 |