KO

Kan Ota

AT Axcelis Technologies: 1 patents #8 of 24Top 35%
📍 Bedford, MA: #25 of 76 inventorsTop 35%
🗺 Massachusetts: #2,865 of 9,131 inventorsTop 35%
Overall (2011): #249,704 of 364,097Top 70%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7924159 Remote wafer presence detection with passive RFID Michael Chen, David Bernhardt 2011-04-12