Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977628 | System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes | Patrick Splinter | 2011-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977628 | System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes | Patrick Splinter | 2011-07-12 |