Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7894038 | Device manufacturing method, lithographic apparatus, and a computer program | Alex Oudshoorn | 2011-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7894038 | Device manufacturing method, lithographic apparatus, and a computer program | Alex Oudshoorn | 2011-02-22 |