Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8060842 | Method, program product and apparatus for model based geometry decomposition for use in a multiple exposure process | — | 2011-11-15 |
| 7864301 | Source and mask optimization by changing intensity and shape of the illumination source | — | 2011-01-04 |
| 7865865 | Method, program product and apparatus for performing decomposition of a pattern for use in a DPT process | — | 2011-01-04 |