Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8014881 | Lithographic apparatus and device manufacturing method | Mark Constant Johannes Baggen, Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Marcel François Heertjes, Dennis Andreas Petrus Hubertina Houben +2 more | 2011-09-06 |