Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927090 | Imprint lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927090 | Imprint lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2011-04-19 |