Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7992115 | Overlay measurement on double patterning substrate | Johannes Anna Quaedackers, Dorothea Maria Christina Oorschot, Hieronymus Johannus Christiaan Meessen, Yin Fong Choi | 2011-08-02 |