Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7889357 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Ralph Brinkhof, Arthur Winfried Eduardus Minnaert, Alex Van Zon | 2011-02-15 |