Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940511 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | — | 2011-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940511 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | — | 2011-05-10 |