Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064148 | High numerical aperture catadioptric objectives without obscuration and applications thereof | Eric Brian Catey, Adel Joobeur | 2011-11-22 |
| 7965378 | Optical system and method for illumination of reflective spatial light modulators in maskless lithography | Kirill Y. Sobolev | 2011-06-21 |