Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041450 | Position sensor system for substrate transfer robot | Masahiro Takizawa | 2011-10-18 |
| 7963736 | Wafer processing apparatus with wafer alignment device | Masahiro Takizawa, Masayuki Akagawa | 2011-06-21 |