Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084104 | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition | Hiroshi Shinriki, Kunitoshi Namba | 2011-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084104 | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition | Hiroshi Shinriki, Kunitoshi Namba | 2011-12-27 |