Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034410 | Protective inserts to line holes in parts for semiconductor process equipment | Ernst H. A. Granneman | 2011-10-11 |
| 8002463 | Method and device for determining the temperature of a substrate | Ernst H. A. Granneman, Pascal Vermont | 2011-08-23 |