Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017182 | Method for depositing thin films by mixed pulsed CVD and ALD | Martin Knapp, Suvi Haukka | 2011-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017182 | Method for depositing thin films by mixed pulsed CVD and ALD | Martin Knapp, Suvi Haukka | 2011-09-13 |