Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048484 | Method for the deposition of a film by CVD or ALD | — | 2011-11-01 |
| 8025922 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2011-09-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048484 | Method for the deposition of a film by CVD or ALD | — | 2011-11-01 |
| 8025922 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2011-09-27 |