Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067061 | Reaction apparatus having multiple adjustable exhaust ports | Jeroen Stoutjesdijk | 2011-11-29 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Matthew G. Goodman, Mark Hawkins, Michael Eugene Givens, Eric Hill, Gregory Bartlett | 2011-11-01 |
| 7993057 | Redundant temperature sensor for semiconductor processing chambers | Mark Kleshock, Loren Jacobs | 2011-08-09 |