Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981791 | Thin films | Suvi Haukka, Wei Li, Juhana Kostamo, Hessel Sprey, Christiaan J. Werkhoven | 2011-07-19 |
| 7927942 | Selective silicide process | — | 2011-04-19 |
| 7921805 | Deposition from liquid sources | Michael A. Todd | 2011-04-12 |
| 7893433 | Thin films and methods of making them | Michael A. Todd | 2011-02-22 |