Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021743 | Process chamber component with layered coating and method | Daijiang Xu, Clifford Stow | 2011-09-20 |
| 7910218 | Cleaning and refurbishing chamber components having metal coatings | Dajiang Xu, Clifford Stow | 2011-03-22 |