Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079894 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Norman Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2011-12-20 |
| 7950407 | Apparatus for rapid filling of a processing volume | Victor Mimken | 2011-05-31 |