Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913645 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Fanos Christodoulou | 2011-03-29 |
| 7902050 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Fanos Christodoulou | 2011-03-08 |