Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8009938 | Advanced process sensing and control using near infrared spectral reflectometry | Lei Lian | 2011-08-30 |
| 7969581 | Determining endpoint in a substrate process | Lei Lian | 2011-06-28 |
| 7946759 | Substrate temperature measurement by infrared transmission | Kenneth J. Bahng | 2011-05-24 |