Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7997851 | Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Robert B. Moore, Eric Ruhland, Satish Sundar | 2011-08-16 |