Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026157 | Gas mixing method realized by back diffusion in a PECVD system with showerhead | Xiesen Yang, Yong Kee Chae, Shuran Sheng | 2011-09-27 |
| 7964430 | Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications | Tae Kyung Won, Soo Young Choi, Yong Kee Chae, Shuran Sheng | 2011-06-21 |
| 7875486 | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning | Soo Young Choi | 2011-01-25 |