Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985379 | Reactor design to reduce particle deposition during process abatement | Ho-Man Rodney Chiu, Daniel O. Clark, Shaun W. Crawford, Jay J. Jung, Robbert M. Vermeulen | 2011-07-26 |