Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055489 | Method for using an RC circuit to model trapped charge in an electrostatic chuck | Brian McMillin | 2011-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055489 | Method for using an RC circuit to model trapped charge in an electrostatic chuck | Brian McMillin | 2011-11-08 |