Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8020750 | Method of attaching components to fluid delivery systems using diffusion bonding | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-09-20 |
| 8017028 | Method of increasing etchability of metals having chemical etching resistant microstructure | Mark Crockett, John W. Lane, Micahel DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-09-13 |
| 7984891 | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus | Mark Crockett, John W. Lane, Michael DeChellis, Chris Melcer, Aneesh Khullar +1 more | 2011-07-26 |
| 7935948 | Method and apparatus for monitoring and control of suck back level in a photoresist dispense system | Natarajan Ramanan | 2011-05-03 |