Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065789 | Method of fabricating a heated substrate support | Rolf Guenther | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065789 | Method of fabricating a heated substrate support | Rolf Guenther | 2011-11-29 |