Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981262 | Process kit for substrate processing chamber | Ilyoung (Richard) Hong | 2011-07-19 |
| 7901552 | Sputtering target with grooves and intersecting channels | — | 2011-03-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981262 | Process kit for substrate processing chamber | Ilyoung (Richard) Hong | 2011-07-19 |
| 7901552 | Sputtering target with grooves and intersecting channels | — | 2011-03-08 |