Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075789 | Remote plasma cleaning source having reduced reactivity with a substrate processing chamber | Karl A. Littau, Chiliang Chen | 2011-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075789 | Remote plasma cleaning source having reduced reactivity with a substrate processing chamber | Karl A. Littau, Chiliang Chen | 2011-12-13 |